MEMS based gas sensors

In this project, the students will develop functional coatings for MEMS-based sensors designed to detect volatile organic compounds generated during semiconductor processes. They will be responsible for both the development of the sensors and the performance evaluation of these devices. Their tasks will include conducting characterization studies and performing gas sensing measurements.

The students will use the thin film deposition and characterization laboratories available at SUNUM and FENS. At the end of this project, they will gain experience in sensor technologies, measurement techniques, and data analysis.